A Method for Preparation of Ordered Porous Silicon Based on a 2D SiO2 Template

(整期优先)网络出版时间:2016-05-15
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Anewmethodforfabricatingorderedporoussiliconisreported.Atwo-dimensionalsilicananospherearrayisusedasatemplatewithahydrofluoricacid-hydrogenperoxidesolutionforetchingthenanospheres.Theinitialdiameteranddistributionoftheholesintheresultingporoussiliconlayeraredeterminedbythesizeanddistributionofthesilicananospheres.Thecorrosiontimecanbeusedtocontrolthedepthsoftheholes.ItisfoundthatthepresenceofaSiO_2layer,formedbytheoxidationoftheroughinternalsurfaceofthehole,istheprimaryreasonallowingthecorrosiontoproceed.Ultravioletreflectionandthermalconductivitymeasurementsshowthatthediameteranddistributionoftheholeshaveagreatinfluenceonpropertiesoftheporoussilicon.