摘要
Thebendingstrengthofmicrofabricatedpolysiliconbeamswasmeasuredbybeambendingusingananoindenter.Also,thetensilestrengthofmicrofabricatedpolysiliconthinfilmswasmeasuredbytensiletestingwithanewmicrotensiletestdevice.Itwasfoundthatthebendingstrengthandtensilestrengthofpolysiliconmicrostructuresexertssizeeffectonthesizeofthespecimens.Insuchcases,thesizeeffectcanbetracedbacktotheratioofsurfaceareatovolumeasthegoverningparameter.Astatisticalanalysisofthebendingstrengthforvariousspecimensizesshowsthattheaveragebendingstrengthofpolysiliconmicrocantileverbeamsis2.885±0.408GPa.ThemeasuredaveragevalueofYoung'smodulus,164±1.2GPa,fallswithinthetheoreticalbounds.Theaveragefracturetensilestrengthis1.36GPawithastandarddeviationof0.14GPa,andtheWeibullmodulusis10.4-11.7,respectively.Thetensiletestingof40specimensonfailureresultsinarecommendationfordesignthatthenominalstrainbemaintainedbelow0.0057.
出版日期
2004年03月13日（中国期刊网平台首次上网日期，不代表论文的发表时间）
