Rapidly Synthesis of Nanocrystalline Diamond Films by Helicon Wave Plasma

(整期优先)网络出版时间:2016-02-12
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AnewtechniqueofthesynthesisofNanocrystallineDiamond(NCD)Filmsbyheliconwaveplasma(HWP)chemicalvapordepositionatroomtemperaturewasreported.ThegrowthmorphologyandtheroughnessofNCDsampleswascharacterizedusingfiledemissionscanningelectronmicroscopy(SEM-SU8010)andatomforcemicroscopy(AFM),respectively.Theresultsshowthegrowthrateofthefilmwasveryfast,about833nm/min.TypicalG,Dbands