简介：Laser-inducedbreakdownspectroscopy(LIBS)wasexaminedtodetectatracesubstanceadheredontoAlalloysforthesurfaceinspectionofmaterialstobeadhesivelybonded.AsanexampleofSicontamination,siliconeoilwasemployedandsprayedontosubstrateswithacontrolledsurfaceconcentration.LIBSmeasurementsemployingnanosecondUVpulses(λ=266nm)andanoff-axisemissioncollectionsystemwithdifferentdetectingheightswereperformed.Becausesurfacecontaminantsareinvolvedintheplasmaformedbylaserablationofthesubstrates,therelativecontributionofthesurfacecontaminantsandthesubstratestotheplasmaemissioncouldbechangeddependingontheconditionsforplasmaformation.Thelimitofdetection(LOD)wasevaluatedunderseveraldetectingconditionsforinvestigatingthefactorsthataffectedtheLOD.Asignificantfactorwasthestandarddeviationvaluesofsignalintensitiesobtainedforthecleansubstrates.Thisvaluevarieddependingonthemeasurementconditions.FortheAlalloy(A6061),thesmallestLODobtainedwas0.529μg·cm^-2.Furthermore,animprovedLOD(0.299μg·cm^-2)wasobtainedfortheAlalloywithalowerSicontent.