简介：分光计的小型化用即时、所在地的大小打开一个新申请区域。Fourier变换分光计(英尺)就它在途径之中的特别优点而言是吸引人的。这份报纸考察微英尺的当前的地位在世界范围并且描述它的开发；另外，分析了是在设计并且制作英尺在小型化期间被解决的关键问题。最后，没有动人的部分的微英尺的一个新奇模型被建议并且分析，它可以为分光计的设计提供新概念。

简介：我们将介绍为制造采用的一些技术和设备悦耳微光学。基于膜的microlenses和扫描镜子具有对这个区域的学术、工业的兴趣的悦耳的液体透镜和透镜数组以及聚合物。

简介：Inthispaper,wepresentahighspeedautofocussystemformicrosystemapplicationsanddesignalook-up-tablebasedautofocusingalgorithmforapplicationswhenatargetobjectisalwaysvisible,e.g.,manufacturingpartswithalignmentfiducials.Weperformanevaluationof24focusmeasurestoverifythatwhichfocusmeasureisthebestforthelook-up-tablebasedmethod.Fromtheevaluation,wefindthattheChebyshevmoments-basedfocusmeasure(CHEB)isthemostsuitable.Furthermore,wealsodevelopalook-up-tablebasedautofocussystemthatusesCHEBasthefocusmeasure.Intrainingphase,weofflineconstructatablefromtrainingimagesofanobjectthatarecapturedatseverallensdistances.Eachentryoftableconsistsoffocusmeasurecomputedfromimageandlensdistance.Inworkingphase,givenaninputimage,thealgorithmfirstcomputesthefocusmeasureandthenfindsthebestmatchfocusmeasurefromthetableandlooksupthecorrespondinglenspositionformovingitintothein-focusposition.Ouralgorithmcanperformautofocusingwithinonly2stepsoflensmoving.Theexperimentshowsthatthesystemcanperformhighspeedautofocusingofmicroobjects.

简介：Anoveldischargedeviceisdesignedonthebasisoftheconfigurationofmicro-hollowcathodedischarge(MHCD).ByusingmanyMHCDsinparallelconnection,amicro-dischargearraycanbeconstructed.Withthemicro-dischargearray,ahigh-pressurehigh-currentdensityglowdischargeplasmascanbeformedtomakeaplasmadisplaypanel(PDP).Anairdischargeexperimentisfinishedwiththedischargedevice.Thestabledirectcurrentglowdischargeisformedunderthepressurefrom20Torrto500Torr.Thevoltage-currentcharacteristiccurveandthedischargephotographarenoted.Thevoltage-currentcharacteristiccurvehasapositivedifferentialresistancecoefficientonthewholedischargerange.Theestimatedcurrentdensityreaches70.1A/cm3,thepowerdensityis3.6×104W/cm3,andtheelectrondensityisintheorderof1013cm-3atp=200TorrandID=10mA.TheexperimentalresultsindicatethatthedesigneddischargedeviceisappropriateforPDP.

简介：Dopedmicro-crystallinesiliconfilmsaredepositedattemperaturesaslowas400℃bythecatalyticchemicalvapordepositionmethodusingasilaneandhydrogengasmixture.ElectricalpropertiessuchasthecarrierconcentrationandtheHallmobilityareinvestigatedforvariousmeasuringtemperatures.Itisfoundthatthegrainsofmicro-crystallinesiliconarepreferentiallyorientedalongthe(220)direction,andthattheHallmobilityislargerthan8cm^2·V^-1·s^-1,thecarrierconcentrationisabout1×10^17cm^-1-1×10^19cm^-3atroomtemperature.

简介：目标结构的机械颤动将调制雷达backscattering的阶段函数，并且将从目标导致返回的信号的频率调整。它产生目标身体Doppler频率的乐队转移的一个方面，它对目标识别有用。基于这，micro-Doppler原子宝库为目标识别被造，并且四种普通分类器独立被使用执行分类识别。模拟试验性的结果证明这个方法让高识别超过90%评价。

简介：Thepropertyofsiliconmicro-capacitiveaccelerometerisanalyzedanddiscussedbyestablishingthemodelofthesensor,tolayabasisforoptimizationdesignofsensorsystemstructure.Discussedissuesincludethestaticmodelinganddynamicbehaviorofthetwocommnlyusedstructures,i.e.,double-cantileversupportedandfour-beamsupportedstructures,andalsothemeasurementrangeofthesedevices.

简介：维的计量学的精确上的要求在半导体生产的区域是特别紧的。这在面具和硅晶片和他们的相应参考计量学上特别地为最小的结构的线宽的测量和控制成立。在这篇论文，我们将描述物理模型和在PTB为光罩线宽计量学被开发的参考书乐器学。它将被显示出，不同方法的结果怎么能被用于比较分析。这些方法的应用程序将根据最新发达的光罩线宽标准作为模范地被演示。

简介：Micro-structures3-Dprofilemeasurementisanimportantmeasurementcontentforresearchonmicro-machiningandcharacterizationofmicro-dimension.Inthispaper,anewmethodinvolved2-Dstructuretemplate,whichguidesphaseunwrapping,isproposedbasedonphase-shiftingmicroscopicinterferometry.Itisfitnotonlyforstaticmeasurement,butalsofordynamicmeasurement,especiallyformotionofMEMSdevices.3-Dprofileofactivecombofmicro-resonatorisobtainedbyusingthemethod.Thetheoreticprecisioninout-of-planedirectionisbetterthan0.5nm.Thein-planetheoreticprecisioninmicro-structuresisbetterthan0.5μm.Butattheedgeofmicro-structures,itisonthelevelofmicrometermainlycausedbyimpreciseedgeanalysis.Finally,itsdisadvantagesandthefollowingdevelopmentarediscussed.

简介：高温度液体被注入微尺寸毛状并且它的轻繁殖行为被调查。我们集中于抽方法的二不同液体。第一个方法能把高温度液体听输入微尺寸由使用一个高压力差别系统毛状。在抽以后，与光搬运人一起连接的单个模式纤维(SMF)基于微波interferometry(OCMI)系统被用来测量不同液体听层次在微尺寸毛状。第二个方法能把房间温度引擎油输入由使用注射泵毛状。当液体被输入时，这个方法能避免空气水泡毛状。

简介：为了完成操纵者的软掌握，工作，钥匙是有与好性能滑动传感器。取决于弹性体和光电的元素在手里安装了，传感器转变在掌握的目标和机器人的手之间的滑动到电的信号，因此，滑动能被检测。它当目标是滑动时，愿望原因弹性体是微颤动的。基于颤动理论，动态理论，轻紧张理论和有弹性的变丑理论，发源是目标是机器人的手有的滑动加速relativingto的结论与光电的元素的产量的线性关系电压的微分，然后为滑动区分的模型被建立。

简介：AnovelLD-pumpedsingle-frequencymicro-chipgreenlaserispresented.ByusingthecombinationofshortcavityandLoytfilterformedbyRochonprismandKTPcrystal,astablesinglefrequencygreenlaserisobtainedwith60mWoutputat500mWLD-pump.Theoptical-to-opticalconversionefficiencyisabout12%.Theopticalcontactbetweencomponentsofthelaserisadopted.Thislaserhastheadvantagesofacompactstructureandalowcost.

简介：Atpresent,boththepointsourceandtheimagingpolarizationnavigationdevicesonlycanoutputtheangleinformation,whichmeansthatthevelocityinformationofthecarriercannotbeextractedfromthepolarizationfieldpatterndirectly.Opticalflowisanimage-basedmethodforcalculatingthevelocityofpixelpointmovementinanimage.However,forordinaryopticalflow,thedifferenceinpixelvalueaswellasthecalculationaccuracycanbereducedinweaklight.Polarizationimagingtechnologyhastheabilitytoimproveboththedetectionaccuracyandtherecognitionprobabilityofthetargetbecauseitcanacquiretheextrapolarizationmulti-dimensionalinformationoftargetradiationorreflection.Inthispaper,combiningthepolarizationimagingtechniquewiththetraditionalopticalflowalgorithm,apolarizationopticalflowalgorithmisproposed,anditisverifiedthatthepolarizedopticalflowalgorithmhasgoodadaptationinweaklightandcanimprovetheapplicationrangeofpolarizationnavigationsensors.Thisresearchlaysthefoundationfordayandnightall-weatherpolarizationnavigationapplicationsinfuture.

简介：Aneffectivedesignmethodoffreeformmicrolensarrayispresentedforshapingvariedlaserbeamsintoprescribedrectangularillumination.Thevariableseparationmappingisappliedtodesignconcavefreeformsurfacesforconstructingafreeformlensarray.Severaldedicatedexamplesshowthatthedesignedfreeformopticallensarraycanachieveaprescribedrectangularilluminationpattern,especiallywithoutconsideringtheinitialstatesofincidentlaserbeams.Bothhighcollectionefficiencyandgoodspatialuniformitycanbeavailablesimultaneously.Toleranceanalysisisalsoperformedtodemonstratethatthisopticaldevicecanwellavoidfabricatingdifficultyinactualapplications.

简介：Laser-inducedbreakdownspectroscopy(LIBS)hasbeenextensivelyappliedduetothecapabilitiesofreal-time,multi-phaseandmulti-elementanalysis.Withtheadvantages,portableLIBSisinrapiddevelopmentwithgreatpotentialoffieldmeasurements.Inthiswork,aportableLIBSwasdevelopedbya50μJlevellaserforexcitationandanobjectivelensforfocusingorimaging.Elementdetectionwassuccessfullyachievedbythissetup,andalsothemicroscopicobservationcouldbeobtainedwiththemagnificationof350×.ApreliminaryinvestigationwascarriedoutformineralrecognitionbythedevelopedportableLIBS.Theobtainedresultsindicatethattheelementdetectioncombinedwithmicroobservationwasaneffectivewayforrecognizingminerals,especiallyforsimilarmineralidentificationordiscrimination.Itissuggestedthatthemicro-joulelasercouldbealternativeforthecommercialportableLIBS,andtheon-sitemineralorrockrecognitionisapromisingfieldfortheapplication.

简介：Thispaperpresentsalargefieldphase-shiftinginterferencemicroscopeformicro-surfacetopographymeasurement.APZTisusedastheZ-directionalphaseshifter.TheinterferencemicroscopeisthecombinationoftheinfinitytubemicroscopewiththeMirautwo-beaminterferometer.Two-dimensionalprecisionmotorizedstageisalignedasthescanningsystemintheX-andY-directiontoextendthetestsurfacemeasurementrangeto12.5mm×12.5mm.Theminimumdisplacementis0.039μmandtheoverlappedproportionis0.22.Afaststitchingalgorithmisproposedbasedongridmatching.Accordingtothereflectivityofthecoreandtheferrule,theplatewiththetransmission/reflectivityratioof70/30isselectedtobalancetheinterferenceintensity.Theinstrumentisprovedtobevalidbyactualmeasurementoftheendsurfaceofanopticalfiberconnector.

简介：Asimplemethodtofabricateone-dimensional(1-D)andtwo-dimensional(2-D)orderedmicro-andnano-scalepatternsisdevelopedbasedontheoriginalmastersfromopticaldiscs,usingnanoimprinttechnologyandsoftstamps.Polydimethylsiloxane(PDMS)wasusedtoreplicatethenegativeimageofthe1-DgratingpatternonthemastersofCD-R,DVD-RandBD-Ropticaldiscs,respectively,andthenthe1-DpatternononeofthePDMSstampswastransferredtoablankpolycarbonate(PC)substratebynanoimprint.The2-DorderedpatternswerefabricatedbythesecondimprintingusinganotherPDMSstamp.Different2-DperiodicpatternswereobtaineddependingonthePDMSstampsandtheanglebetweenthetwotimesofimprints.Thismethodmayprovideawayforthefabricationofcomplex2-Dpatternsusingsimple1-Dmasters.

简介：AnovelopticalfibersensorwithaU-shapedmicro-groovestructureablatedbyfemtosecondlaseronsingle-modefi-berformeasuringairrelativehumidity（RH）isreportedinthispaper.Inordertoimprovetheaccuracyofsensor,agrapheneoxide（GO）/polyvinylalcohol（PVA）compositefilmiscoatedonthesurfaceofmicro-groovestructure.IntheU-shapedmicro-groovestructure,theremainingcoreandmicro-cavityinthemicro-groovemakeuptwomajorop-ticalpropagationpaths,formingaMach-Zehnderinterferometer（MZI）.ThesensorhasagoodlinearresponsewithintheRHrangeof30%--85%,andthemaximumsensitivitycanreach0.6381mrd%RH.Theeffectoftemperatureontheoverallperformanceofthehumiditysensorisalsoinvestigated.Asanewtypeofall-fiberdevice,thesensorshowsexcellentsensitivityandstability.

简介：GaNmicrocrystallinegrainsweregrownbyhot-wallchemicalvapordepositiononSi(111)substrate.Thesegrainswithdiametersof2-4μmweredetectedbyscanningelectronmicroscopy.X-raydiffraction,Fouriertransformationinfraredtransmissionspectroscopyandphotoluminescencewereusedtoanalyzethestructure,compositionandtheopticalpropertiesofthesamples.TheresultsshowthatthemicrocrystallinegrainsarehexagonalwurtziteGaN,andthepropertyofthegrainswasgreatlyaffectedbythegrowthtime.

简介：Room-temperatureterahertz（THz）detectorsindicateagreatpotentialintheimagingapplicationbecauseoftheirreal-time,compactbulk,andwidespectralbandrespondingcharacteristics.THzdetectorswithdifferentdimensionsbasedonamicro-bridgestructurehavebeendesignedandfabricatedtogetoptimizedmicro-bolometerparametersfromthetestresultsofmembranedeformation.Ananostructuredtitanium（Ti）thinfilmabsorberisintegratedinthemicro-bridgestructureoftheVOxmicro-bolometerbyacombinedprocessofmagnetronsputteringandreactiveionetching（RIE）,anditsimprovementofTHzabsorptionisverifiedbyanopticalcharacteristicsmesurement.Continuous-waveTHzdetectionandimagingaredemonstratedbyusinga2.52THzfarinfraredCO2laseranda320×240vanadiumoxidemicro-bolometerfocalplanearraywithanoptimizedcellstructure.Withthisdetectingsystem,THzimagingofmetalconcealedinawipingclothandanenvelopeisdemonstrated,respectively.