OPTICAL EFFECTS AND MICROSTRUCTURE OF BURIED INSULATOR LAYER FORMED BY O~+ AND N~+ CO-IMPLANTATION-中国期刊网

摘要 ThemicrostructureandopticalpropertiesofaburiedlayerformedbyO+(200keV,1.8×1018/cm2)andN+(180keV,4×1017/cm2)co-implantationandannealedat1200℃for2hhavebeeninvestigatedbyAugerelectron,IRabsorptionandreflectionspectroscopicmeasurements.TheresultsshowthattheburiedlayerconsistsofsilicondioxideandSiOx（x<2）andthenitrogensegregatestothewingsoftheburiedlayerwhereitformsanoxynitride.BydetailtheoreticalanalysisandcomputersimulationoftheIRreflectioninterferencespectrum,therefractiveindexprofilesoftheburiedlayerwereobtained.

1孙大谦;王文权;宣兆志;任振安. Effects of alloy elements on microstructure and crack resistance of Fe-C-Cr weld surfacing layer.焊接,2003-02.
2HanLei YeXingning等. INCREASING BREAKDOWN VOLTAGE OF LDMOST USING BURIED LAYER.物理电子学,2003-01.
3Li, Zhi; Ding, Hao; Zhang, Jun; Wang, Hanbin; Wang, Hao. Effects of annealing temperature and time on microstructure and magnetic properties of Pr-Co thin films.金属材料,2012-02.
4徐仰涛;娄德超;夏荣里;夏天东. Microstructure and microhardness of Co-8.8Al-9.8W superalloy cladding layer with different boron content.焊接,2017-04.
5徐明升;张恒;周泉斌;王洪. Effects of p-type Ga N thickness on optical properties of Ga N-based light-emitting diodes.物理电子学,2016-04.
6YULishen;GUANZF;等. Photoelastic Fabry—Perot Optical Modulator Based on a Silicon—on—Insulator Structure.物理电子学,1996-03.
7ZHU Rui. Superfluid-Mott-Insulator Phase .Transition of Bosons in an Optical Lattice.物理,2007-05.
8QU Haixia;WU Qiong;WEN Hongquan. Effects of CeO2 additives on the microstructure and mechanical properties of WC-Al2O3 composites.钢铁冶金,2015-03.
9QuanchengZHANG;WenlongZHENG;等. Characterization of Rust Layer Formed on Low alloy Steel Exposed in Marine Atmosphere.材料科学与工程,2002-05.
10Xiang XlA;Xiangping JIANG;Chao CHEN;Xingan JIANG;Na TU;Yunjing CHEN. Effects of Cr2O3 doping on the microstructure and electrical properties of （Ba,Ca）（Zr,Ti）O3 lead-free ceramics.材料科学与工程,2016-02.

OPTICAL EFFECTS AND MICROSTRUCTURE OF BURIED INSULATOR LAYER FORMED BY O~+ AND N~+ CO-IMPLANTATION

来源期刊

相关推荐

同分类资源更多

相关关键词

OPTICAL EFFECTS AND MICROSTRUCTURE OF BURIED INSULATOR LAYER FORMED BY O~+ AND N~+ CO-IMPLANTATION

来源期刊

相关推荐

同分类资源 更多

相关关键词

同分类资源更多