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Microlens fabricated in silicon on insulator using porous silicon

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摘要 Inordertorealizetheplanargradientrefractiveindex(GRIN)microlenswhichisbaseduponporoussilicon(PSi)andfabricatedonsilicononinsulator(SOI),anovelanodizationmethodisusedbyapplyinglateralelectricfield.Themicrolenswithsmoothvariationoftheeffectiveopticalthicknessisachieved.Thelensistransparentintheinfraredregion,includingtheopticalcommunicationwindow(1.3μm

DOI 54kwx7534k/1214481

作者钟福如;吕小毅;贾振红;田敏

机构地区不详

出处《光电子快报：英文版》 2013年2期

关键词绝缘体上硅微透镜多孔硅制造 GRIN 梯度折射率

分类 [电子电信][物理电子学]

出版日期 2013年02月12日（中国期刊网平台首次上网日期，不代表论文的发表时间）

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来源期刊

光电子快报：英文版

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相关关键词

绝缘体上硅微透镜多孔硅制造 GRIN 梯度折射率

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